One force driving Cu diffusion into interlayer dielectrics

Advanced Metallization Conference (AMC)

Volumn , Issue , 2001, Pages 493-495

  Fukuda, T ^a   Nishino, H ^a   Matsuura, A ^a   Matsunaga, H ^a   Itoh, H ^a  

^a ASSOCIATION OF SUPER ADVANCED ELECTRONICS TECHNOLOGIES ASET   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; DIFFUSION IN SOLIDS; GETTERS; MAGNETIC MOMENTS; OXYGEN;

INTERLAYER DIELECTRICS (ILD);

DIELECTRIC FILMS;

EID: 0035554939     PISSN: 10480854     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)