Electrical and structural properties of Si nanocrystals prepared by ion-beam-assisted electron beam deposition

Journal of the Korean Physical Society

Volumn 39, Issue SUPPL. Part 1, 2001, Pages

  Park, Kyung Hwa ^a   Kim, Yong ^a   Chung, Tae Hun ^a   Bark, Hong Jun ^a   Yi, Jae Yel ^a   Choi, Won Chel ^b   Kim, Eun Kyu ^b  

^a Dong A University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035542159     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

1. J. H. Shin, H. S. Han, S. Y. Seo and W. H. Lee, J. Korean Phys. Soc. 34, S16 (1999).
2. K. Han, I. Kim and H. Shin, J. Korean Phys. Soc. 37, 907 (2000).
3. S. Tiwari, F. Rana, H. Hanafi, A. Hartstein, E. F. Crabbe and K. Chan, Appl. Phys. Lett. 68, 1377 (1996).
4. S. H. Choi, J. Korean Phys. Soc. 37, 461 (2000).
5. M. Fujii, S. Hayashi and K. Yamamoto, Jpn. J. Appl. Phys. 30, 687 (1991).
6. S. Lombardo, S. Coffa, C. Bongiorno, C. Spinella, E. Castagna, A. Sciuto, C. Gerardi, F. Ferrari, B. Fazio and S. Privitera, Mat. Sci. Eng. B69-70, 295 (2000).
7. D. M. Fleetwood, M. R. Shaneyfelt, W. L. Warren, J. R. Schwank, T. L. Meisenheimer and P. S. Winokur, Microelectron. Reliab. 35, 403 (1995).
8. C. Spinella, S. Lombardo and F. Priolo, J. Appl. Phys. 84, 5383 (1998).
9. J. von Borany, R. Grotzschel, K.-H. Heinig, A. Markwitz, B. Schmidt, W. Skorupa and H.-J. Thees, Solid State Electron. 43, 1159 (1999).
10. L. Tsybeskov, G. F. Grom, M. Jungo, L. Montes, P. M. Fauchet, J. P. McCaffrey, J.-M. Baribeau, G. I. Sproule and D. J. Lockwood, Mater. Sci. & Eng. B 69-70, 303 (2000).
11. T. Maeda, E. Suzuki, I. Sakata, M. Yamanaka and K. Ishii, Nanotechnology 10, 127 (1999).
12. Y. Shi, K. Saito, H. Ishikuro and T. Hiramoto, J. Appl. Phys. 84, 2358 (1998).