Analysis of near-field intensity distributions of high-compression talbot array illuminators using rigorous diffraction theory

Optical Review

Volumn 8, Issue 4, 2001, Pages 271-275

  Klaus, Werner ^a   Oka, Keiko ^b   Fujino, Makoto ^c   Kodate, Kashiko ^b  

^a NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY   (Japan)

^b JAPAN WOMEN'S UNIVERSITY   (Japan)

^c TOPCON CORPORATION   (Japan)

Author keywords

Illumination efficiency; Near field optics; Rigorous coupled wave analysis; Talbot array illuminator; Talbot effect

Indexed keywords

EID: 0035540469     PISSN: 13406000     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10043-001-0271-6     Document Type: Article

References (12)

1. A. W. Lohmann: Optik (Stuttgart) 79 (1988) 41.
2. See, for example, V. Arrizón, J. G. Ibarra and J. Ojeda-Castañeda: J. Opt. Soc. Am. A 13 (1996) 2414.
3. W. Klaus, Y. Arimoto and K. Kodate: J. Opt. Soc. Am. A 14 (1997) 1092.
4. See, for example, V. Arrizón and J. Ojeda-Castañeda: Appl. Opt. 33 (1994) 5925.
5. W. Klaus, Y. Arimoto and K. Kodate: Appl. Opt. 37 (1998) 4357.
6. W. Klaus and K. Kodate: Technical Digest of Diffractive Optics and Micro-Optics (OSA) (1998) p. 219.
7. E. Noponen and J. Turunen: Opt. Commun. 98 (1993) 132.
8. M. G. Moharam, D. A. Pommet, E. B. Grann and T. K. Gaylord: J. Opt. Soc. Am. A 12 (1995) 1077.
9. W. Klaus, Y. Hamaguchi, K. Kodate and Y. Arimoto: Proc. Soc. Photo-Opt. Instr. Eng. 3010 (1997) 38.
10. V. Arrizón, E. Lopez-Olazagasti and A. Serrano-Heredia: Opt. Lett. 21 (1996) 233.
11. J. R. Leger and G. J. Swanson: Opt. Lett. 15 (1990) 288.
12. H. Hamam: Opt. Commun. 131 (1996) 359.