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Volumn 46, Issue 8, 2001, Pages 962-967
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Generation and accumulation of dislocations on the silicon surface under the action of pulse-periodic emission from a YAG : Nd laser
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0035535478
PISSN: 10637842
EISSN: None
Source Type: Journal
DOI: 10.1134/1.1395116 Document Type: Article |
Times cited : (3)
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References (17)
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