Effect of oxygen plasma treatment on anodic bonding

Journal of the Korean Physical Society

Volumn 38, Issue 3, 2001, Pages 207-209

  Choi, Seung Woo ^a   Choi, Woo Beom ^a   Lee, Yun Hi ^a   Ju, Byeong Kwon ^a   Kim, Byong Ho ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Korea University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035532355     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

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7. S. Takeda, K. Yamamoto, Y. Hayasaka and K. Matsumoto, J. Non-Crystalline Solids 249, 41 (1999).