Polymer masks on semiconductors: A novel way to nanostructures

Physica Status Solidi (B) Basic Research

Volumn 224, Issue 3, 2001, Pages 867-870

  Haupt, M ^a   Miller, S ^a   Bitzer, K ^a   Thonke, K ^a   Sauer, R ^a   Spatz, J P ^a   Mossmer S ^a   Hartmann, C ^a   Moller M ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035531316     PISSN: 03701972     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-3951(200104)224:3<867::AID-PSSB867>3.0.CO;2-Q     Document Type: Article

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