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Volumn 4, Issue 11, 2001, Pages
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Nondestructive depth determination of subsurface microdefects in silicon wafers
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Nissei Bldg
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
CALCULATIONS;
CRYSTAL DEFECTS;
LASER APPLICATIONS;
LASER BEAMS;
LIGHT ABSORPTION;
LIGHT SCATTERING;
NONDESTRUCTIVE EXAMINATION;
SURFACES;
THERMAL EFFECTS;
TOMOGRAPHY;
TRANSMISSION ELECTRON MICROSCOPY;
LASER SCATTERING TOMOGRAPHY;
NONDESTRUCTIVE DEPTH DETERMINATION;
SUBSURFACE MICRODEFECTS;
SILICON WAFERS;
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EID: 0035525668
PISSN: 10990062
EISSN: None
Source Type: Journal
DOI: 10.1149/1.1405996 Document Type: Article |
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Times cited : (6)
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References (10)
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