Analytic approximations for multiserver batch-service workstations with multiple process recipes in semiconductor wafer fabrication

IEEE Transactions on Semiconductor Manufacturing

Volumn 14, Issue 4, 2001, Pages 395-405

  Huang, Ming Guang ^a,b   Chang, Pao Long ^c   Chou, Ying Chyi ^d  

^a IEEE   (Taiwan)

^b SHIH CHIEN UNIVERSITY   (Taiwan)

^c NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^d MING CHUAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BALANCE EQUATIONS; BATCH SERVICE BATCH LOT WORKSTATIONS; MULTIPLE PROCESS RECIPES; SEMICONDUCTOR WAFER FABRICATION;

APPROXIMATION THEORY; COMPUTER SIMULATION; COMPUTER WORKSTATIONS; MATHEMATICAL MODELS; PERFORMANCE; QUEUEING THEORY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0035508755     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.964327     Document Type: Article

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