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Thin Solid Films

Volumn 398, Issue 399, 2001, Pages 326-330

Thin-film elastic-property measurements with laser-ultrasonic SAW spectrometry

(3) Hurley, D C a Tewary, V K a Richards, A J b

a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

b CSIRO (Australia)

Author keywords

Elastic properties; Surface acoustic waves; Titanium nitride

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ELASTIC MODULI; ELASTICITY; GREEN'S FUNCTION; POISSON RATIO; SILICON WAFERS; SINGLE CRYSTALS; SPECTROMETRY;

PULSED LASERS;

THIN FILMS;

EID: 0035505772 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01338-4 Document Type: Article

Times cited : (56)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.