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Volumn 48, Issue 11, 2001, Pages 2551-2554
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Horizontal current bipolar transistor (HCBT): A new concept of silicon bipolar transistor technology
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Author keywords
Bipolar; HCBT; Horizontal; Lateral; Self aligned
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Indexed keywords
BORON;
COMPUTER SIMULATION;
ELECTRIC PROPERTIES;
ION IMPLANTATION;
OXIDATION;
PHOSPHORUS;
POLYSILICON;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR DOPING;
SILICON NITRIDE;
SURFACES;
HORIZONTAL CURRENT BIPOLAR TRANSISTOR;
SILICON BIPOLAR TRANSISTOR TECHNOLOGY;
SINGLE POLYSILICON LAYER;
VERTICAL CURRENT DEVICES;
BIPOLAR TRANSISTORS;
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EID: 0035505631
PISSN: 00189383
EISSN: None
Source Type: Journal
DOI: 10.1109/16.960381 Document Type: Article |
Times cited : (9)
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References (8)
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