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Volumn 16, Issue 11, 2001, Pages 930-935
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Ion beam and chemically assisted ion beam etching of InP with anisotropic and smooth surfaces
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Author keywords
[No Author keywords available]
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Indexed keywords
ANISOTROPY;
ARGON;
ATOMIC FORCE MICROSCOPY;
ETCHING;
ION BEAMS;
SEMICONDUCTOR DEVICE STRUCTURES;
SURFACE ROUGHNESS;
CHEMICALLY ASSISTED ION BEAM ETCHING (CAIBE);
SEMICONDUCTING INDIUM PHOSPHIDE;
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EID: 0035505149
PISSN: 02681242
EISSN: None
Source Type: Journal
DOI: 10.1088/0268-1242/16/11/308 Document Type: Article |
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Times cited : (4)
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References (10)
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