Measurement of two-dimensional distribution of pure axial force in active polishing

Measurement Science and Technology

Volumn 12, Issue 11, 2001, Pages 1976-1982

  Kim, Sug Whan ^a,b,c   Walker, David ^b  

^a Yonsei University   (South Korea)

^b UNIVERSITY COLLEGE LONDON   (United Kingdom)

^c CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Characterization; Force distribution; Non axial force compensation; Polishing; Sensor array

Indexed keywords

LOADS (FORCES); POLISHING MACHINES; REAL TIME SYSTEMS; SEMICONDUCTOR MATERIALS; SENSITIVITY ANALYSIS; SHEAR STRESS; STRAIN GAGES; THERMAL EFFECTS;

SENSOR ARRAYS;

SENSORS;

MEASUREMENT METHOD; POLISHING; RHEOLOGY;

EID: 0035504534     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/12/11/329     Document Type: Article

References (14)

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9. Fabrication of large optical surfaces using a combination of polishing and mirror bending
10. The production of highly aspheric mirrors using active laps
11. OGLP-400: An innovative computer-controlled polishing machine
12. Computer controlled polishing of moderate-sized general aspherics for instrumentation