Effect of gradient a-SiCx interlayer on adhesion of DLC films

Materials Chemistry and Physics

Volumn 72, Issue 2, 2001, Pages 163-166

  Lung, B H ^a   Chiang, M J ^a   Hon, M H ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Adhesion; ECR plasma heating; Interfaces

Indexed keywords

ADHESION; CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; PLASMA HEATING; SILICON WAFERS; SUBSTRATES;

REACTANT GASES;

DIAMOND LIKE CARBON FILMS;

EID: 0035500845     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(01)00428-X     Document Type: Article

References (4)