Inspection of nano-sized SNOM-tips by optical far-field evaluation

Optics and Lasers in Engineering

Volumn 36, Issue 5, 2001, Pages 451-473

  Seebacher, S ^a   Osten, W ^a   Veiko, V P ^b   Voznessenski, N B ^b  

^a BIAS BREMER INSTITUT FÜR ANGEWANDTE STRAHLTECHNIK GMBH   (Germany)

^b ITMO UNIVERSITY   (Russian Federation)

Author keywords

Far field evaluation; Near field optical microscopy; Optical metrology; Tip inspection

Indexed keywords

CHARGE COUPLED DEVICES; GLASS FIBERS; NANOSTRUCTURED MATERIALS;

OPTICAL METROLOGY;

NEAR FIELD SCANNING OPTICAL MICROSCOPY;

EID: 0035500182     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(01)00072-0     Document Type: Article

References (10)

1. Near field microscopy and near field optics
2. Parameter control, characterization, and optimization in the fabrication of optical fiber near-field probes
3. VDI technologiezentrum - Physikalische technologien
4. Far field characterization of diffracting circular apertures
5. Light propagation through nanometer sized structures: The two-dimensional-aperture scanning near-field optical microscope
6. Resolution: A survey