Visualization of Knoop Indentation Damage of Silicon Nitride by Plasma Etching

Journal of the American Ceramic Society

Volumn 84, Issue 10, 2001, Pages 2427-2429

  Kanematsu, Wataru ^a   Miyajima, Tatsuya ^a   Sando, Mutsuo ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRACK PROPAGATION; CRYSTAL MICROSTRUCTURE; FRACTURE TOUGHNESS; GRAIN SIZE AND SHAPE; INDENTATION; MICROCRACKING; PLASMA ETCHING; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; ULTRASONIC CLEANING; VISUALIZATION;

GRAIN FALLING OFF REGION; INDENTATION CRACKS; KNOOP INDENTATION DAMAGE;

SILICON NITRIDE;

EID: 0035497613     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.2001.tb01026.x     Document Type: Article

References (9)

1. H. Makino, N. Kamiya, S. Wada, and O. Kamigaito, "Strength Degradation of Ceramics by Contact Damage"; MRS Int. Mtg. Adv. Mater., 5, 373-78 (1989).
2. M. Reece and F. Guiu, "Repeated Indentation Method for Studying Cyclic Fatigue in Ceramics," J. Am. Ceram. Soc., 73 [4] 1004-13 (1990).
3. M. Li and M. J. Reece, "Influence of Grain Size on the Indentation-Fatigue Behavior of Alumina," J. Am. Ceram. Soc., 83 [4] 967-70 (2000).
4. O. O. Ajayi, R. H. Lee, and R. E. Cook, "Plasma Etching of Structural Ceramics for Microstructural Analysis," Mater. Sci. Eng. A, A169, L5-L7 (1993).
5. M. Mitomo, Y. Sato, I. Yashima, and M. Tsutsumi, "Plasma Etching of Non-oxide Ceramics," J. Mater. Sci. Lett., 10, 83-84 (1990).
6. M. Mitomo, Y. Sato, N. Ayuzawa, and I. Yashima, "Plasma Etching of Sialon Ceramics," J. Am. Ceram. Soc., 74 [4] 856-58 (1991).
7. J. Dulak, B. J. Howard, and Ch. Steinbrüchel, "Etch Mechanism in the Reactive Ion Etching of Silicon Nitride," J. Vac. Sci. Technol. A, 9 [3] 775-778 (1991).
8. W. Kanematsu, M. Sando, L. K. Ives, R. Marinenko, and G. D. Quinn, "Dye Impregnation Method for Revealing Machining Crack Geometry," J. Am. Ceram. Soc., 84 [4] 795-800 (2001).
9. G. D. Quinn, R. J. Gettings, and J. J. Kübler, "Fractography and the Surface Crack in Flexure (SCF) Method for Evaluating Fracture Toughness of Ceramics"; pp. 107-44 in Ceramic Transactions, Vol. 64, Fractography of Glasses and Ceramics III. Edited by J. R. Varner, V. D. Frechette, and G. D. Quinn. American Ceramic Society, Westerville, OH, 1995.