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Volumn 29, Issue 5 I, 2001, Pages 759-761
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Early history of vacuum arc deposition
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Author keywords
Arthur W. Wright; Coatings; History; Thin films; Thomas A. Edison; Vacuum arc
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Indexed keywords
CATHODE SHIELDING;
MIRROR COATINGS;
SEED LAYERS;
SUBSTRATE MOTION;
VACUUM ARC DEPOSITION;
CATHODES;
COATINGS;
DEPOSITION;
ELECTRIC BREAKDOWN;
ELECTRIC CURRENTS;
HISTORY;
MULTILAYERS;
PLASMAS;
THIN FILMS;
VACUUM APPLICATIONS;
ELECTRIC ARCS;
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EID: 0035485554
PISSN: 00933813
EISSN: None
Source Type: Journal
DOI: 10.1109/27.964470 Document Type: Article |
Times cited : (24)
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References (14)
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