Development of a linear electrostrictive servo motor

Precision Engineering

Volumn 25, Issue 4, 2001, Pages 316-320

  Hu, Min ^a   Zhou, Zhaoying ^b   Li, Yong ^b   Du, Hejun ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

Clamping mechanism; Electrostrictive actuator; Linear inchworm motor; Micro EDM; Precision motion control

Indexed keywords

ACTUATORS; CLAMPING DEVICES; ELECTROSTRICTION; LEARNING ALGORITHMS; LINEAR CONTROL SYSTEMS; LINEAR MOTORS; MACHINING; MATHEMATICAL MODELS; POSITION CONTROL; PRECISION ENGINEERING;

MICROELECTRICAL DISCHARGE MACHINING (MICRO-EDM) SYSTEMS;

SERVOMOTORS;

EID: 0035479469     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(01)00085-X     Document Type: Article

References (6)

1. Developing a linear piezomotor with nanometer resolution, and high stiffness
2. Development of a walking drive ultraprecision positioner
3. Ultraprecision feed system based on walking drive
4. Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control
5. Modeling hystersis in piezoceramic actuators