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Volumn 14, Issue 10, 2001, Pages 820-825
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Metallization and interconnection of HTS YBCO thin film devices and circuits
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Author keywords
[No Author keywords available]
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Indexed keywords
DEPOSITION;
ETCHING;
ION BEAMS;
LITHOGRAPHY;
THIN FILM DEVICES;
YIELD STRESS;
YTTRIUM COMPOUNDS;
CONTACT RESISTIVITY;
HIGH TEMPERATURE SUPERCONDUCTORS;
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EID: 0035472109
PISSN: 09532048
EISSN: None
Source Type: Journal
DOI: 10.1088/0953-2048/14/10/303 Document Type: Article |
Times cited : (17)
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References (16)
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