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Volumn 12, Issue 9, 2001, Pages 551-554
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Optimization of pre-metal dielectric (PMD) materials
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Author keywords
[No Author keywords available]
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Indexed keywords
BOROSILICATE GLASS;
CHEMICAL MECHANICAL POLISHING;
CRYSTAL IMPURITIES;
DEGRADATION;
FIELD EFFECT TRANSISTORS;
HOT CARRIERS;
LEAKAGE CURRENTS;
OPTIMIZATION;
SEMICONDUCTING FILMS;
SILICA;
STRESSES;
THRESHOLD VOLTAGE;
PRE-METAL DIELECTRIC (PMD) MATERIALS;
DIELECTRIC MATERIALS;
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EID: 0035455080
PISSN: 09574522
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1012461728470 Document Type: Article |
Times cited : (15)
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References (7)
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