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Volumn 12, Issue 9, 2001, Pages 551-554

Optimization of pre-metal dielectric (PMD) materials

Author keywords

[No Author keywords available]

Indexed keywords

BOROSILICATE GLASS; CHEMICAL MECHANICAL POLISHING; CRYSTAL IMPURITIES; DEGRADATION; FIELD EFFECT TRANSISTORS; HOT CARRIERS; LEAKAGE CURRENTS; OPTIMIZATION; SEMICONDUCTING FILMS; SILICA; STRESSES; THRESHOLD VOLTAGE;

EID: 0035455080     PISSN: 09574522     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1012461728470     Document Type: Article
Times cited : (15)

References (7)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.