Some optical properties of amorphous hydrogenated carbon thin films prepared by rf plasma deposition using methane

Microelectronics Journal

Volumn 32, Issue 9, 2001, Pages 783-786

  Alves, Marco A R ^a   Rossetto, Jônatas F ^a   Balachova, Olga ^a   Braga, Edmundo Da Silva ^a   Cescato, Lucila ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

Amorphous; Carbon; PACVD; Radio frequency; Refractive index

Indexed keywords

CARBON; ENERGY GAP; HYDROGENATION; INFRARED SPECTROMETERS; INFRARED TRANSMISSION; LIGHT ABSORPTION; LIGHT REFLECTION; METHANE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX; THIN FILMS;

OPTICAL GAP;

AMORPHOUS FILMS;

EID: 0035452332     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(01)00046-5     Document Type: Article

References (16)