Fabrication of GaN photonic crystals for 400 nm wavelength

Microelectronic Engineering

Volumn 57-58, Issue , 2001, Pages 843-849

  Peyrade, David ^a   Chen, Yong ^a   Manin Ferlazzo, Laurence ^a   Lebib, Amira ^a   Grandjean, Nicolas ^b   Coquillat, Dominique ^a   Legros, Rene ^a   Lascaray, Jean Paul ^a  

^a CNRS   (France)

^b CRHEA CNRS   (France)

Author keywords

Nanofabrication; Photonic crystals; Reactive ion etching

Indexed keywords

ENERGY GAP; LIGHT EMITTING DIODES; LIGHT POLARIZATION; LIGHT PROPAGATION; PHOTONS; REACTIVE ION ETCHING;

PHOTONIC CRYSTALS (PC);

GALLIUM NITRIDE;

EID: 0035450658     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00441-5     Document Type: Article

References (10)