Anodization of Al-Nd alloy films in nonaqueous electrolyte solutions for TFT-LCD application

Electrochimica Acta

Volumn 47, Issue 1, 2001, Pages 217-223

  Ue, Makoto ^a   Mizutani, Fumikazu ^a   Takaha, Hiroshi ^a   Takeuchi, Sachie ^a   Sugiyama, Kiyoshi ^b   Nishiwaki, Tetsuo ^b   Sato, Nariaki ^b  

^a MITSUBISHI CHEMICAL CORPORATION   (Japan)

^b Tsukuba Laboratory   (Japan)

Author keywords

Al Nd alloy; Anodization; Nonaqueous electrolyte; Oxide film; TFT LCD

Indexed keywords

ALUMINUM ALLOYS; ANODIC OXIDATION; ELECTROLYTES; GLASS; LIQUID CRYSTAL DISPLAYS; SPUTTERING; SUBSTRATES; THIN FILM TRANSISTORS;

NONAQUEOUS ELECTROLYTE SOLUTIONS;

METALLIC FILMS;

EID: 0035450294     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0013-4686(01)00550-3     Document Type: Article

References (5)

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5. M. Ue, F. Mizutani, S. Takeuchi, N. Sato, Denki Kagaku 65 (1997) 1070.