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Volumn 10, Issue 9-10, 2001, Pages 1622-1626

Theoretical analysis of ion bombardment roles in the bias-enhanced nucleation process of CVD diamond

Author keywords

Bias enhanced nucleation; CVD diamond; Ion bombardment

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC FIELDS; EPITAXIAL GROWTH; GLOW DISCHARGES; ION BOMBARDMENT; NUCLEATION;

EID: 0035448807     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00435-6     Document Type: Article
Times cited : (23)

References (26)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.