|
Volumn 10, Issue 9-10, 2001, Pages 1622-1626
|
Theoretical analysis of ion bombardment roles in the bias-enhanced nucleation process of CVD diamond
|
Author keywords
Bias enhanced nucleation; CVD diamond; Ion bombardment
|
Indexed keywords
CHEMICAL VAPOR DEPOSITION;
ELECTRIC FIELDS;
EPITAXIAL GROWTH;
GLOW DISCHARGES;
ION BOMBARDMENT;
NUCLEATION;
ION NUMBER;
SYNTHETIC DIAMONDS;
DIAMOND;
|
EID: 0035448807
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(01)00435-6 Document Type: Article |
Times cited : (23)
|
References (26)
|