SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Micromechanics and Microengineering

Volumn 11, Issue 5, 2001, Pages 595-602

Novel micro torque measurement method for microdevices

(5) Ota, H a Ohara, T a Karata, Y a Nakasima, S a Takeda, M a

a MITSUBISHI ELECTRIC CORPORATION (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FRICTION; MICROELECTRONIC PROCESSING; MICROMETERS; MOTORS; PRESSURE EFFECTS; SHAFTS (MACHINE COMPONENTS); TORQUE MEASUREMENT; TURBINES;

MICRO TORQUE MEASUREMENT; MICROMOTOR; MOTOR SHAFT; ROTATING MICRODEVICES; STATIC FRICTION TORQUE; WIND PRESSURE;

MICROELECTROMECHANICAL DEVICES;

EID: 0035444065 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/11/5/324 Document Type: Article

Times cited : (16)

References (10)

1
- 0027187555
- A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils
- (1993) Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (Fort Lauderdale, FL, USA, 1993) , pp. 1-6
- Chong, H.¹ Yong, J.K.² Mark, G.A.³

2
- 0027239304
- A first functional current excited planar rotational magnetic micromotor
- (1993) Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (Fort Lauderdale, FL, USA, 1993) , pp. 7-11
- Guckel, H.¹ Christenson, T.R.² Skrobis, K.³

3
- 0029759775
- Coil winding process for radial gap type electromagnetic devices with cylindrical stator
- (1996) Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (Amsterdam, the Netherlands, 1996) , pp. 325-330
- Ota, H.¹ Araki, T.² Narumiya, H.³ Oda, T.⁴ Kobayashi, M.⁵

4
- 0033727388
- Deformable magnetic mirror for adaptive optics: First results
- (2000) Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (Miyazaki, Japan, 2000) , pp. 485-490
- Cugat, O.¹ Mounaix, P.² Basrour, S.³ Divoux, C.⁴ Reyne, G.⁵

5
- 0001978848
- Fabrication and evaluation of micromotors
- (1993) First Int. Advanced Robotics Programme Workshop on Micro b Robotics and Systems (Karlsruhe, Germany, 1993) , pp. 98-107
- Mikuriya, Y.¹ Matsuzaki, K.² Matsuo, T.³

6
- 0027310092
- Outer rotor surface micromachined wobble microactuator
- (1993) Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (Fort Lauderdale, FL, USA, 1993) , pp. 161-166
- Furuhata, T.¹ Hirano, T.² Lane, L.H.³

7
- 0028510478
- Micro torque measurements for a prototype turbine
- (1994) J. Micromech. Microeng. , vol.4 , pp. 129-139
- Mathieson, D.¹ Robertson, B.J.² Beerschwinger, U.³ Yang, S.J.⁴ Reubent, R.L.⁵ Addlesee, A.J.⁶ Spencer, J.⁷ Lawes, R.A.⁸

8
- 0024768967
- A design overview of an eccentric-motion electro static microactuator (the wobble motor)
- (1989) Sensors Actuators , vol.20 , pp. 1-16
- Jacobsen, S.C.¹ Price, R.H.² Wood, J.E.³ Rytting, T.H.⁴

9
- 0028098354
- Micro-torque sensor based on differential force measurement
- (1994) Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (Oiso, Japan, 1994) , pp. 241-244
- Gass, V.¹ Schoot, B.H.² Jeaner, E.S.³ Rooij, N.F.⁴

10
- 0003157353
- Experimental chain-type micromachine for inspection on outer surface of tubes
- (1999) Proc. 5th Int. Micromachine Symposium (Tokyo, Japan, 1999) , pp. 161-166
- Narumiya, H.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.