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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 5, 2001, Pages 2514-2521

Characterization of sputtered indium tin oxide layers as transparent contact material

(3) Franz, Gerhard a Lange, Benjamin b Sotier, Stefan b

a INFINEON TECHNOLOGIES AG (Germany)

b UNIVERSITY OF APPLIED SCIENCES (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC CONDUCTIVITY; GRAIN SIZE AND SHAPE; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; TENSILE STRESS; TRANSPARENCY; X RAY SPECTROSCOPY;

INDIUM TIN OXIDE LAYERS; TRANSPARENT CONTACT MATERIALS;

INDIUM COMPOUNDS;

EID: 0035443910 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1389901 Document Type: Article

Times cited : (10)

References (21)

1
- 84944818463
- (1966) Bell Syst. Tech. J. , vol.45 , pp. 233
- Lepselter, M.P.¹

2
- 0018481934
- (1979) Thin Solid Films , vol.60 , pp. 237
- Garceau, W.J.¹ Fournier, P.R.² Herb, G.K.³

3
- 0010322611
- Technical Report No. G830-1, Stanford University, Stanford, CA 94305, Dec.
- (1987) Modelling and Measurement of Contact Resistances , pp. 11
- Loh, W.M.¹

4
- 0001392162
- (1993) J. Electrochem. Soc. , vol.140 , pp. 847
- Franz, G.¹ Amann, M.-C.²

5
- 0021097455
- (1983) Thin Solid Films , vol.102 , pp. 1
- Chopra, K.L.¹ Major, S.² Pandya, D.K.³

6
- 0032686934
- (1999) Thin Solid Films , vol.342 , pp. 167
- Brehme, S.¹ Fenske, F.² Furs, W.³ Nebauer, E.⁴ Poschenrieder, M.⁵ Selle, B.⁶ Sieber, I.⁷

7
- 10044287856
- (1998) J. Appl. Phys. , vol.83 , pp. 2631
- Tahar, R.B.H.¹ Ban, T.² Ohya, Y.³ Takahashi, Y.⁴

8
- 0031702268
- (1998) Thin Solid Films , vol.312 , pp. 268
- Morgan, D.V.¹ Aliyu, Y.H.² Bunce, R.W.³ Salehi, A.⁴

9
- 0001022502
- (1997) J. Appl. Phys. , vol.82 , pp. 865
- Tahar, R.B.H.¹ Ban, T.² Ohya, Y.³ Takahashi, Y.⁴

10
- 0027666759
- (1993) J. Phys. D , vol.26 , pp. 1510
- Manivannan, P.¹ Subrahmanyam, A.²

11
- 0023327115
- (1987) Thin Solid Films , vol.148 , pp. 279
- Chaudhuri, S.¹ Bhattacharyya, J.² Pal, A.K.³

12
- 0034186881
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 814
- Adurodija, F.O.¹ Izumi, H.² Ishihara, T.³ Yoshioka, H.⁴ Motoyama, M.⁵ Murai, K.⁶

13
- 0003406742
- Wiley, New York, Chap. 7
- (1971) Introduction to Solid State Physics, 4th ed.
- Kittel, Ch.¹

14
- 3943079631
- Springer, Berlin
- (1994) Oberflächentechnologie mit Niederdruckplasmen, 2nd ed. , pp. 172
- Franz, G.¹

15
- 0003154684
- J. v. Sengers (American Society of Mechanical Engineers, New York)
- (1982) Proc. 8th Sympos. Thermphys. Prop.
- Hensel, F.¹

16
- 0027641625
- (1993) Appl. Surf. Sci. , vol.68 , pp. 497
- Wu, W.F.¹ Chiou, B.S.²

17
- 0026882431
- (1992) Mater. Sci. Eng., B , vol.14 , pp. 115
- Wen, S.J.¹ Campet, G.² Portier, J.³ Goodenough, J.B.⁴

18
- 0021466165
- (1984) Thin Solid Films , vol.117 , pp. 201
- Knoll, R.W.¹ Bradley, E.R.²

19
- 0003278916
- (1989) IPAT Proc. , vol.7 , pp. 196
- Mansour, H.¹ Salama, M.S.² Arnell, D.R.³ Mostafa, A.A.F.⁴

20
- 0024607781
- (1989) Thin Solid Films , vol.169 , pp. 105
- Franz, G.¹

21
- 0033639775
- (2000) Semicond. Sci. Technol. , vol.15 , pp. 67
- Morgan, D.V.¹ Al-Ofi, I.M.² Aliyu, Y.H.³

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