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Volumn 19, Issue 5, 2001, Pages 2571-2577
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Hydrogen outgasing from titanium-modified layers with various surface treatments
a b c d e e e e
b
ULVAC PHI Inc
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
BUFFING;
CHEMICAL MECHANICAL POLISHING;
DESORPTION;
HYDROGEN;
OPTICAL MICROSCOPY;
SURFACE STRUCTURE;
SURFACE TREATMENT;
THICKNESS MEASUREMENT;
TITANIUM;
ULTRAHIGH VACUUM;
X RAY PHOTOELECTRON SPECTROSCOPY;
EXTREMELY HIGH VACUUM (XHV);
THERMAL DESORPTION;
DEGASSING;
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EID: 0035443268
PISSN: 07342101
EISSN: None
Source Type: Journal
DOI: 10.1116/1.1392396 Document Type: Article |
Times cited : (11)
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References (11)
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