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Volumn 11, Issue 5, 2001, Pages 603-611

Resolution enhanced proximity printing by phase and amplitude modulating masks

Author keywords

[No Author keywords available]

Indexed keywords

AMPLITUDE MODULATION; COMPUTER SIMULATION; ELECTRON BEAM LITHOGRAPHY; LIGHT MODULATION; LIGHT TRANSMISSION; MASKS; OPTICAL DESIGN; PHASE MODULATION;

EID: 0035442590     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/5/325     Document Type: Article
Times cited : (12)

References (12)
  • 9
    • 0015327061 scopus 로고
    • A practical algorithm for the determination of phase from image and diffraction plane pictures
    • (1972) Optik , vol.35 , pp. 237-246
    • Gerchberg, R.W.1    Saxton, W.O.2
  • 12
    • 30844447240 scopus 로고
    • Diffractive optical elements: Iterative calculation of quantized, blazed phase structures
    • (1990) J. Opt. Soc. Am. A , vol.7 , pp. 961-969
    • Wyrowski, F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.