Research on a diamond tip wear mechanism in atomic force microscope-based micro/nano-machining

High Technology Letters

Volumn 7, Issue 3, 2001, Pages 84-89

  Zhao, Q ^a   Dong, S ^a   Sun, T ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Atomic force microscope; Chemical wear; Diamond tip; Micro nano machining; Single crystal silicon

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIAMONDS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; SILICON; SINGLE CRYSTALS; STRESS CONCENTRATION; WEAR OF MATERIALS;

NANO-MACHINING;

MICROMACHINING;

EID: 0035438823     PISSN: 10066748     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

1. Nanotribology studies of carbon surfaces by force microscopy