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Volumn 230, Issue 1-2, 2001, Pages 224-231
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Growth of large diameter silicon tube by EFG technique: Modeling and experiment
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Author keywords
A1. Growth models; A2. Edge defined film fed growth; A2. Tube growth
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Indexed keywords
COMPUTER SIMULATION;
HEAT TRANSFER;
INTERFACES (MATERIALS);
MAGNETIC FIELD EFFECTS;
MATHEMATICAL MODELS;
SEMICONDUCTOR GROWTH;
EDGE-DEFINED FILM-FED GROWTH (EFG);
SEMICONDUCTING SILICON;
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EID: 0035426611
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(01)01327-6 Document Type: Conference Paper |
Times cited : (20)
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References (9)
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