In the age of 300mm silicon, tech standards are even more crucial

Solid State Technology

Volumn 44, Issue 8, 2001, Pages

  Gehman, B L ^a  

^a Semiconductor Equip and Mat Intl   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER CONTROL; COMPUTER SOFTWARE; ELECTRONICS PACKAGING; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; SOCIETIES AND INSTITUTIONS; STANDARDS;

PHOTONIC DEVICES; SEMICONDUCTOR INDUSTRY;

ELECTRONICS INDUSTRY;

EID: 0035423918     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (0)