An efficient treatment technique for TMAH wastewater by catalytic oxidation

IEEE Transactions on Semiconductor Manufacturing

Volumn 14, Issue 3, 2001, Pages 202-206

  Hirano, Keiji ^a   Okamura, Junji ^b   Taira, Tsutomu ^a   Sano, Kunio ^b   Toyoda, Arata ^a   Ikeda, Mitsuaki ^b  

^a NEC CORPORATION   (Japan)

^b NIPPON SHOKUBAI CO LTD   (Japan)

Author keywords

Catalyst; Tetramethylammoniumhydroxide (TMAH); Treatment; Trimethylamine (TMA); Wastewater

Indexed keywords

AMMONIUM COMPOUNDS; BIOLOGICAL WATER TREATMENT; CATALYSTS; OXIDATION; PHOTOLITHOGRAPHY; PYROLYSIS; WASTEWATER TREATMENT;

CATALYTIC OXIDATION; SELECTIVE OXIDATION; TETRAMETHYLAMMONIUMHYDROXIDE; TRIMETHYLAMINE; WASTEWATER DISPOSAL PROBLEM;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0035423122     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.939814     Document Type: Article

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5. 2 in wet stream
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8. New technology for selective catalytic oxidation of ammonia to nitrogen
9. 2 catalysts
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11. Nitrification at high concentrations of ammonia and fluoride using rotating biological contactors