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Volumn 72, Issue 8, 2001, Pages 3473-
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A novel angular motion vacuum feedthrough
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0035418834
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1374588 Document Type: Article |
Times cited : (26)
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References (0)
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