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Volumn 24, Issue 3, 2001, Pages 171-177
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A systems approach to semiconductor optimization
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Author keywords
Computer aided systems engineering; Manufacturing; Process optimization; Semiconductor manufacturing; Yield
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Indexed keywords
COMPUTER AIDED MANUFACTURING;
OPTIMIZATION;
PRINTED CIRCUIT BOARDS;
SYSTEMS ANALYSIS;
THYRISTORS;
PROCESS CAPABILITY RATIOS (PCR);
PROCESS OPTIMIZATIONS;
SEMICONDUCTOR DEVICE MANUFACTURE;
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EID: 0035401601
PISSN: 1521334X
EISSN: None
Source Type: Journal
DOI: 10.1109/6104.956802 Document Type: Article |
Times cited : (5)
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References (15)
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