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Volumn 229, Issue 1, 2001, Pages 31-34

Development of crystal supporting system for diameter of 400 mm silicon crystal growth

Author keywords

B2. Semiconducting silicon

Indexed keywords

CRYSTAL GROWTH FROM MELT; QUARTZ; SEMICONDUCTOR GROWTH;

EID: 0035399285     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(01)01045-4     Document Type: Article
Times cited : (6)

References (6)
  • 3
    • 84992573148 scopus 로고    scopus 로고
    • Jp. Patent Tokukai-Hei 11-92279 (1999)
    • T. Iida, M. Kuramoto, Jp. Patent Tokukai-Hei 11-92279 (1999).
    • Iida, T.1    Kuramoto, M.2
  • 4
    • 84992543870 scopus 로고    scopus 로고
    • Jp. Patent Tokukai-Hei 11-106281 (1999)
    • M. Kuramoto, T. Iida, Jp. Patent Tokukai-Hei 11-106281 (1999).
    • Kuramoto, M.1    Iida, T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.