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Volumn 229, Issue 1, 2001, Pages 31-34
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Development of crystal supporting system for diameter of 400 mm silicon crystal growth
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Author keywords
B2. Semiconducting silicon
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Indexed keywords
CRYSTAL GROWTH FROM MELT;
QUARTZ;
SEMICONDUCTOR GROWTH;
CRYSTAL SUPPORTING SYSTEMS (CSS);
SEMICONDUCTING SILICON;
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EID: 0035399285
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(01)01045-4 Document Type: Article |
Times cited : (6)
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References (6)
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