Implementation of integrated real-time multi-sensors on a multi-wafer production MBE system

Journal of Crystal Growth

Volumn 227-228, Issue , 2001, Pages 238-243

  Wang, Guang ^a   Ren, Ge ^a   Le, Luan ^a   Lee, Henry P ^a   Pinsukanjana, Paul ^b   Hubbard, Jared ^b   Kao, Yung Chung ^b  

^a University of California at Irvine   (United States)

^b Intelligent Epitaxy Technology Inc   (United States)

Author keywords

A3. Molecular beam epitaxy; B2. Semiconducting III V materials; B3. High electron mobility transistors

Indexed keywords

HIGH ELECTRON MOBILITY TRANSISTORS; MOLECULAR BEAM EPITAXY; REAL TIME SYSTEMS; SEMICONDUCTOR DEVICE MANUFACTURE; SENSOR DATA FUSION;

MULTIWAFER PRODUCTION SYSTEMS;

SEMICONDUCTOR GROWTH;

EID: 0035399112     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(01)00690-X     Document Type: Conference Paper

References (7)