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Volumn 79, Issue 4, 2001, Pages
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Surface engineering for lithography - A series of compromises
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
ANODIC OXIDATION;
CAUSTIC SODA;
COATING TECHNIQUES;
ELECTRIC CURRENTS;
ELECTROCHEMISTRY;
HYDROPHILICITY;
HYDROPHOBICITY;
PLATE METAL;
SODIUM COMPOUNDS;
SURFACE ROUGHNESS;
SURFACE TREATMENT;
DEGREASING;
DESMUTTING;
ROUGHENING;
SURFACE ENGINEERING;
LITHOGRAPHY;
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EID: 0035394561
PISSN: 00202967
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (14)
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References (0)
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