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Volumn 36, Issue 13, 2001, Pages 3283-3289

Effect of process parameters on synthesis of aluminum nitride powder prepared by chemical vapor deposition

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; ELECTRON DIFFRACTION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; POWDER METALS; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

EID: 0035393697     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1017907024197     Document Type: Article
Times cited : (13)

References (27)
  • 21
    • 0004479574 scopus 로고
    • Powder Diffraction Filed Card No. 25-1133, JCPDS Internateral Center for Diffraction Data, Swarthmore, PA, USA
    • (1975)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.