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Volumn 36, Issue 13, 2001, Pages 3283-3289
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Effect of process parameters on synthesis of aluminum nitride powder prepared by chemical vapor deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
COMPOSITION EFFECTS;
ELECTRON DIFFRACTION;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
POWDER METALS;
SYNTHESIS (CHEMICAL);
THERMAL EFFECTS;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION ANALYSIS;
MIXING MODES;
ALUMINUM NITRIDE;
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EID: 0035393697
PISSN: 00222461
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1017907024197 Document Type: Article |
Times cited : (13)
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References (27)
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