Si-based resonant-cavity-enhanced photodetector

Optical Engineering

Volumn 40, Issue 7, 2001, Pages 1192-1194

  Wang, Q ^a   Li, C ^a   Cheng, B ^a   Yang, Q ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

Bottom illumination; Bragg reflector; RCE photodetector; Responsivity spectra; SiGe Si; SIMOX; Top illumination

Indexed keywords

COMPUTER SIMULATION; LIGHT REFLECTION; MIRRORS; MOLECULAR BEAM EPITAXY; OPTICAL DESIGN; QUANTUM EFFICIENCY; SEMICONDUCTOR QUANTUM WELLS; SEPARATION; SILICA; SILICON ALLOYS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

BOTTOM-ILLUMINATION; BRAGG REFLECTOR; RESONANT-CAVITY-ENHANCED PHOTODETECTOR; RESPONSIVITY SPECTRA; SEPARATION-BY-IMPLANTED-OXYGEN WAFER; TOP-ILLUMINATION; TRANSFER MATRIX METHOD;

PHOTODETECTORS;

EID: 0035388685     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1371542     Document Type: Article

References (13)

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