Molecular dynamics study of the role of ion bombardment in cubic boron nitride thin film deposition

Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 911-915

  Koga, H ^a   Nakamura, Y ^a,b   Watanabe, S ^a,b   Yoshida, T ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Cubic boron nitride; Defects; Growth models; Ion bombardment; Molecular dynamics; Nucleation

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; ION BOMBARDMENT; MOLECULAR DYNAMICS; NUCLEATION; THIN FILMS;

PROJECTILE ENERGY;

CUBIC BORON NITRIDE;

FILM;

EID: 0035387790     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01063-5     Document Type: Article

References (9)