In situ film diagnostics during plasma polymerisation using waveguide mode spectroscopy

Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 1105-1108

  Jacobsen, V ^a   Menges, B ^a   Scheller, A ^a   Forch R ^a   Mittler, S ^a   Knoll, W ^a  

^a MAX PLANCK INSTITUTE FOR POLYMER RESEARCH   (Germany)

Author keywords

In situ characterization; Plasma polymerization; Refractive index; Thin films; Waveguide mode spectroscopy

Indexed keywords

DEPOSITION; DIFFRACTION GRATINGS; FILM GROWTH; PLASMA POLYMERIZATION; REFRACTIVE INDEX; SPECTROSCOPIC ANALYSIS;

PROPAGATION CONSTANT;

PLASTIC FILMS;

POLYMERIZATION;

EID: 0035387596     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01261-0     Document Type: Article

References (9)