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Volumn 50, Issue 7, 2001, Pages 727-731
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Measurement of hydrogen in BCN films by nuclear reaction analysis
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Author keywords
BCN film; Hardness; Hydrogen; IBAD; RNRA
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Indexed keywords
CONCENTRATION (PROCESS);
ELECTRON BEAMS;
HYDROGEN;
ION BEAM ASSISTED DEPOSITION;
NUCLEAR RADIATION SPECTROSCOPY;
SILICON;
SUBSTRATES;
ELECTRON BEAM HEATING;
DIAMOND LIKE CARBON FILMS;
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EID: 0035387404
PISSN: 05145163
EISSN: None
Source Type: Journal
DOI: 10.2472/jsms.50.727 Document Type: Article |
Times cited : (1)
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References (9)
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