Miniaturized high-frequency carrier-type thin-film magnetic field sensor with high sensitivity

IEEE Transactions on Magnetics

Volumn 37, Issue 4 I, 2001, Pages 2042-2044

  Kikuchi, H ^b   Ajiro, N ^b   Yamaguchi, M ^a,b   Arai, K I ^a,b   Takezawa, M ^a,c  

^a IEEE   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

^c KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Domain structure; High frequency carrier type thin film magnetic field sensor; Laminated sensor; Lift off

Indexed keywords

CONDUCTIVE MATERIALS; ELECTRIC IMPEDANCE MEASUREMENT; ION BEAMS; MAGNETIC DOMAINS; MILLING (MACHINING); SENSORS;

LIFT OFF PROCESS; MINIATURIZATION;

MAGNETIC THIN FILMS;

EID: 0035385942     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.951047     Document Type: Article

References (10)

1. Magneto-impedance in sputtered amorphous films for micro magnetic sensor
2. Miniaturization of high-frequency carrier-type thin-film magnetic field sensor
3. Enhancement of giant magneto-impedance in layered film by insulator separation
4. High frequency signal response of impedance matched UHF carrier type head
5. Integration of high-frequency carrier-type thin-film magnetic field sensor with SmCo thin-film bias magnet
6. Field detection characteristics of different magnetic sensor using integrated thin-film MI sensor heads
7. High-frequency carrier-type thin-film magnetic field sensor using lift-off process
8. Integrated magnetic recording heads
9. Permeability of narrow permalloy stripes
10. Analysis of the high-frequency impedance of micromachined films