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Volumn 388, Issue 1-2, 2001, Pages 114-119

Analysis of X-ray photoelectron spectra of amorphous carbon nitride films

Author keywords

Carbon nitride; Dual ion beam deposition; X Ray photoelectron spectrum

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CARBON NITRIDE; CHEMICAL ACTIVATION; CHEMICAL BONDS; COMPOSITION EFFECTS; FILM PREPARATION; ION BEAM ASSISTED DEPOSITION; ION BOMBARDMENT; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0035372261     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)00848-3     Document Type: Article
Times cited : (8)

References (15)
  • 11
    • 0005326231 scopus 로고    scopus 로고
    • Ph.D Thesis, Chemistry Department, Harvard University, USA
    • (1998)
    • Stevens, A.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.