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Volumn 388, Issue 1-2, 2001, Pages 114-119
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Analysis of X-ray photoelectron spectra of amorphous carbon nitride films
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Author keywords
Carbon nitride; Dual ion beam deposition; X Ray photoelectron spectrum
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
CARBON NITRIDE;
CHEMICAL ACTIVATION;
CHEMICAL BONDS;
COMPOSITION EFFECTS;
FILM PREPARATION;
ION BEAM ASSISTED DEPOSITION;
ION BOMBARDMENT;
X RAY DIFFRACTION ANALYSIS;
X RAY PHOTOELECTRON SPECTROSCOPY;
THERMAL ACTIVATION;
AMORPHOUS FILMS;
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EID: 0035372261
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(01)00848-3 Document Type: Article |
Times cited : (8)
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References (15)
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