Fabrication and electric properties of LaCoO3 thin films by ion-beam sputtering

Thin Solid Films

Volumn 388, Issue 1-2, 2001, Pages 183-188

  Hattori, T ^a   Matsui, T ^a   Tsuda, H ^a   Mabuchi, H ^a   Morii, K ^a  

^a Osaka Prefecture University   (Japan)

Author keywords

Annealing; Electrical properties and measurements; Qxides; Sputtering

Indexed keywords

ANNEALING; COBALT COMPOUNDS; ELECTRIC CONDUCTIVITY; LANTHANUM COMPOUNDS; METAL INSULATOR BOUNDARIES; PHASE TRANSITIONS; POWDERS; SPUTTERING; THIN FILMS;

ION BEAM SPUTTERING;

SEMICONDUCTING FILMS;

EID: 0035372149     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)00822-7     Document Type: Article

References (19)