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Volumn 76, Issue 1-3, 2001, Pages 299-303
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Electrical and structural characterisation of mesoporous silica thin films as humidity sensors
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Author keywords
Electrical characterisation; Humidity sensors; Mesoporous silica; Self assembly process; Thin films
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Indexed keywords
ALUMINA;
ELECTRODES;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
HUMIDITY CONTROL;
SEMICONDUCTING SILICON COMPOUNDS;
SILICA;
SUBSTRATES;
THIN FILMS;
HUMIDITY SENSORS;
MESOPOROUS SILICA THIN FILMS;
SENSORS;
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EID: 0035369347
PISSN: 09254005
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-4005(01)00590-1 Document Type: Conference Paper |
Times cited : (76)
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References (14)
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