Calculation of reactor impedance for helicon discharge

IEEE Transactions on Plasma Science

Volumn 29, Issue 3, 2001, Pages 502-511

  Park, B H ^a   Yoon, N S ^b   Choi, Duk In ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Chungbuk National University   (South Korea)

Author keywords

Antenna; Helicon; Impedance; Mode analysis

Indexed keywords

BOUNDARY CONDITIONS; ELECTRIC FIELDS; ELECTRIC IMPEDANCE; ELECTRON CYCLOTRON RESONANCE; INDUCTIVELY COUPLED PLASMA; MAGNETIC FIELDS; MAXWELL EQUATIONS; PLASMA DENSITY;

AXIAL-PERPENDICULAR FIELD CONTRIBUTIONS; ELECTRON-ION CONTRIBUTIONS; HELICON DISCHARGE; MODE ANALYSIS; REACTOR IMPEDANCE;

PLASMA SOURCES;

EID: 0035363373     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.928948     Document Type: Article

References (12)

1. Resonance wave discharge and collisional energy absorption in helicon plasma source
2. Generallized theory of helicon waves. I. Normal modes
3. Helicons - The early years
4. Generalized theory of helicon waves. II. Excitation and absorption
5. The absorption mechanisms of whistler waves in cool, dense, cylindrically bounded plasmas
6. The field and power absorption profiles in helicon plasma resonators
7. Role of helicon waves on high-density plasma production
8. A 1D cylindrical kinetic wave code for helicon plasma sources
9. Space charge waves in cylindrical plasma column
10. Effect of boundary conditions on radial mode structure of whistlers
11. Power coupling to helicon and Trivelpiece-Gould modes in helicon sources