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Volumn 13, Issue 6, 2001, Pages 579-581
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InP-InGaAsP wafer-bonded vertically coupled x-crossing multiple channel optical add-drop multiplexer
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Author keywords
Optical directional couplers; Optical filters; Semiconductor waveguides; Wafer bonding; Waveguide couplers; Wavelength division multiplexing (WDM)
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Indexed keywords
BONDING;
EPITAXIAL GROWTH;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
OPTICAL INTERCONNECTS;
PHOTOLITHOGRAPHY;
REFRACTIVE INDEX;
SEMICONDUCTING INDIUM COMPOUNDS;
SEMICONDUCTOR DEVICE MANUFACTURE;
SILICON NITRIDE;
WAVEGUIDE COUPLERS;
WAVEGUIDES;
WAVELENGTH DIVISION MULTIPLEXING;
OPTICAL ADD DROP MULTIPLEXER;
OPTICAL VERTICALLY COUPLED DEVICES;
WAFER BONDING;
MULTIPLEXING EQUIPMENT;
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EID: 0035362737
PISSN: 10411135
EISSN: None
Source Type: Journal
DOI: 10.1109/68.924026 Document Type: Article |
Times cited : (7)
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References (11)
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