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Volumn 16, Issue 6, 2001, Pages 455-462

A simplified fabrication process for HgCdTe photoconductive detectors using CH4/H2 reactive-ion-etching-induced blocking contacts

(5) Smith, E P G a,b Winchester, K J a Musca, C A a Dell, J M a Faraone, L a

a UNIVERSITY OF WESTERN AUSTRALIA (Australia)

b APPLIED OPTOELECTRONICS INC (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; DETECTORS; FABRICATION; HYDROGEN; INTERFACES (MATERIALS); MASKS; MERCURY COMPOUNDS; METHANE; OHMIC CONTACTS; PASSIVATION; PHOTOLITHOGRAPHY; PLASMA ETCHING; REACTIVE ION ETCHING; SEMICONDUCTOR DOPING;

PHOTOCONDUCTIVE DETECTORS; PHOTOLITHOGRAPHIC MASKING;

PHOTOCONDUCTING DEVICES;

EID: 0035362342 PISSN: 02681242 EISSN: None Source Type: Journal
DOI: 10.1088/0268-1242/16/6/306 Document Type: Article

Times cited : (4)

References (23)

1
- 0026899971
- (1992) Microelectron. J. , vol.23 , pp. 305-313
- Piotrowski, J.¹

2
- 0000385987
- (1994) Microelectron. J. , vol.25 , pp. 713-739
- Shen, S.C.¹

3
- 0027610056
- (1993) Semicond. Sci. Technol. , vol.8 , pp. 788-804
- Reine, M.B.¹ Maschhoff, K.R.² Tobin, S.P.³ Norton, P.W.⁴ Mroczkowski, J.A.⁵ Krueger, E.E.⁶

4
- 0030419021
- (1996) Semicond. Sci. Technol. , vol.11 , pp. 1906-1911
- Siliquni, J.F.¹ Faraone, L.²

5
- 0001975862
- ed R C Breckenridge (New York: Wiley)
- (1957) Photoconductivity Conf. , pp. 215-267
- Rittner, E.S.¹

6
- 77957072797
- ed R K Willardson and A C Beer (New York: Academic)
- (1981) Semiconductors and Semimetals , vol.18 , pp. 157
- Broudy, R.M.¹ Mazurczyk, V.J.²

7
- 0001550776
- ed C Hisum (New York: North-Holland)
- (1981) Handbook on Semiconductors , pp. 727-798
- Elliot, C.T.¹ Gordon, N.T.²

8
- 84957159662
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 450-459
- Nemirovsky, Y.¹ Bahir, G.²

9
- 0019537731
- (1981) Infrared Phys. , vol.21 , pp. 105-115
- Shacham-Diamand, Y.J.¹ Kidron, I.²

10
- 0020206873
- (1982) Infrared Phys. , vol.22 , pp. 367-376
- Ashley, T.¹ Elliot, C.T.²

11
- 0021455878
- (1984) Phys. Lett. Appl. , vol.45 , pp. 83-85
- Smith, D.L.¹ Arch, D.K.² Wood, R.A.³ Walter Scott, M.⁴

12
- 0017469898
- (1977) Infrared Phys. , vol.17 , pp. 127-135
- Kinch, M.A.¹ Borrello, S.R.² Simmons, A.³

13
- 0031355167
- (1997) Proc. SPIE , vol.2999 , pp. 118-130
- Pearton, S.J.¹

14
- 0000931712
- (1998) J. Electron. Mater. , vol.27 , pp. 661-667
- Musca, C.A.¹ Smith, E.P.G.² Siliquini, J.F.³ Dell, J.M.⁴ Faraone, L.⁵

15
- 0030194174
- (1996) Semicond. Sci. Technol. , vol.11 , pp. 1116-1120
- Belas, E.¹ Franc, J.² Toth, A.³ Moravec, P.⁴ Grill, R.⁵ Sitter, H.⁶ Hosch, P.⁷

16
- 0020206873
- (1982) Infrared Phys. , vol.22 , pp. 367-376
- Ashley, T.¹ Elliot, C.T.²

17
- 0000747442
- (1991) Appl. Phys. Lett. , vol.59 , pp. 1752-1754
- Semu, A.¹ Montelius, L.² Leech, P.³ Jamieson, D.⁴ Silverberg, P.⁵

18
- 0034207734
- (2000) Infrared Phys. , vol.41 , pp. 175-186
- Smith, E.P.G.¹ Musca, C.A.² Faraone, L.³

19
- 84935375728
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 105-109
- Leech, P.W.¹ Reeves, G.K.²

20
- 0027609744
- (1993) Semicond. Sci. Technol. , vol.8 , pp. 872-887
- Bajaj, J.¹ Tennant, W.E.² Zucca, R.³ Irvine, S.J.C.⁴

21
- 0001686015
- (1956) Proc. IRE , vol.April , pp. 474
- Wallmark, J.T.¹

22
- 0020129227
- (1982) IEEE Electron Device Lett. , vol.3 , pp. 111-113
- Reeves, G.K.¹ Harrison, H.B.²

23
- 0032296101
- ed V Kumar and S K Agarwal (New Delhi: Narosa Publishing House)
- (1998) Physics of Semiconductor Devices , pp. 774-777
- Ashokan, R.¹ Gandhi, A.² Veer, B.³ Sharma, B.L.⁴ Dhar, V.⁵ Srivastava, S.⁶ Makani, S.⁷ Dewan, H.S.⁸ Gopal, V.⁹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.