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Volumn 17, Issue 1-2, 2001, Pages 291-294
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Influence of the initial layers on the optical and electrical properties of ITO films
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Author keywords
Atomic force microscopy (AFM); Grain size; Indium tin oxide (ITO); Surface roughness; Thin films growth
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Indexed keywords
AGGLOMERATION;
ATOMIC FORCE MICROSCOPY;
CRYSTALLIZATION;
DEPOSITION;
ELECTRIC RESISTANCE;
EVAPORATION;
FILM GROWTH;
GRAIN SIZE AND SHAPE;
IODINE COMPOUNDS;
LIGHT TRANSMISSION;
OPTICAL PROPERTIES;
OXYGEN;
SURFACE ROUGHNESS;
THIN FILMS;
INDIUM TIN OXIDE;
REACTIVE THERMAL EVAPORATION (RTE);
OPTICAL FILMS;
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EID: 0035360485
PISSN: 09253467
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-3467(01)00051-9 Document Type: Conference Paper |
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Times cited : (14)
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References (9)
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