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Volumn 30, Issue 6, 2001, Pages 637-642
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Improvement of the accuracy of the in-situ ellipsometric measurements of temperature and alloy composition for MBE grown HgCdTe LWIR/MWIR structures
a a b c a |
Author keywords
Alloy composition; CdxZn1 xTe; CdTe; Hg1 xCdxTe; In situ monitoring; LWIR; MWIR; Spectroscopic ellipsometry; Temperature
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Indexed keywords
COMPOSITION EFFECTS;
COMPUTER SIMULATION;
ELLIPSOMETRY;
EPITAXIAL GROWTH;
MOLECULAR BEAM EPITAXY;
SEMICONDUCTOR GROWTH;
TEMPERATURE;
TEMPERATURE MEASUREMENT;
CADMIUM ZINC TELLURIDE;
IN SITU ELLIPSOMETRIC MEASUREMENT;
MERCURY CADMIUM TELLURIDE;
SEMICONDUCTING CADMIUM TELLURIDE;
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EID: 0035359391
PISSN: 03615235
EISSN: None
Source Type: Journal
DOI: 10.1007/BF02665848 Document Type: Article |
Times cited : (9)
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References (12)
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